Sensitive high-resolution ion microprobe

The sensitive high-resolution ion microprobe is a large-diameter, double-focusing secondary ion mass spectrometer (SIMS) sector instrument produced by Australian Scientific Instruments in Canberra, Australia. Similar to the IMS 1270-1280-1300 large-geometry ion microprobes produced by CAMECA, Gennevilliers, France and like other SIMS instruments, the SHRIMP microprobe bombards a sample under vacuum with a beam of primary ions that sputters secondary ions that are focused, filtered, and measured according to their energy and mass.


The sensitive high-resolution ion microprobe is a large-diameter, double-focusing secondary ion mass spectrometer (SIMS) sector instrument produced by Australian Scientific Instruments in Canberra, Australia. Similar to the IMS 1270-1280-1300 large-geometry ion microprobes produced by CAMECA, Gennevilliers, France and like other SIMS instruments, the SHRIMP microprobe bombards a sample under vacuum with a beam of primary ions that sputters secondary ions that are focused, filtered, and measured according to their energy and mass.
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